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UVISEL PLUS Spectroscopic Ellipsometer | Horiba
Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm . The Reference Ellipsometer for Thin Film Measurements . The UVISEL Plus ellipsometer offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. The new UVISEL Plus includes the newest acquisition technology designed to measure faster and more accurately than ever. FastAcq, the newest acquisition technology, is based on double modulation, designed for real world thin film characterization. Based on a new electronic, data processing and high speed monochromator, the new FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution.
Description
Features and Benefits:
Highest accuracy and sensitivity
Modular design
Large spectral range: 190-2100 nm
Fully integrated software package for measurement, modelling and automatic operations
Obtained information:
Thin film thickness from 1Å to 50 µm
Surface and interface roughness
Optical constants (n,k) for isotropic, anisotropic and graded films
Derived optical data such as: absorption coefficient α, optical bandgap Eg
Material properties: compound alloy composition, porosity, crystallinity, morphology and more
Mueller matrix
Depolarization
Technical Specifications:
Spectral range: from 190 to 885 nm │NIR extension option up to 2100 nm
Detection: High resolution monochromator coupled to sensitive detectors
Manual Configuration:
Spot size: 0.05 – 0.1 – 1 mm (pinhole)
Sample stage: 150 mm, manual height (20mm) and tilt adjustment
Goniometer: Manually adjustable angle from 55° to 90° by step of 5°
Automatic Configuration:
Automation sample stage: 200x200mm, 300×300 mm XY sample stage, manual height (4mm) and tilt adjustment, XYZ sample stage, theta stage
Automatic goniometer: Automatically adjustable angle from 45° to 90° by step of 0.01°
Integrated Goniometer:
Manual angle of incidence: 35° to 90° by 5° step
Sample holder: 150mm, 20mm manual z height adjustment
Autocollimation system for sample alignment in option
Dimension: width: 25cm; height: 35cm; depth: 21 cm
In situ configuration:
Mechanical adaptation: CF35 or KF40 flanges
Easy swith between in-situ and ex-situ configurations
Additional information
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