Features & Benefits:
RF-Only generator is Class E standard and optimized for stability and crater shape allowing for real surface analysis.
Source can be pulsed with synchronized acquisition for optimum results on fragile samples. The use of an RF source allows analysis of conventional and non conventional layers and materials.
Simultaneous optic provides full spectral coverage from 110 to 800nm, including deep UV access to analyze H, O, C, N and Cl.
HORIBA original, ion-etched holographic gratings assure the highest light throughput and resolution for maximum light efficiency and sensitivity.
Patented HDD detection provides speed and sensitivity in detection without compromise.
On line measurement of crater depth and erosion rate with patented built in Interferometer. DIP.
Easily accessible sample compartment allows plenty of room for sample loading.
Powerful QUANTUM™ software with Tabler report writing tool.
CenterLite laser pointer (patent pending) for precise sample loading.
Monochromator option available only from HORIBA provides the perfect tool to increase instrument flexibility while adding “n+1” capability.
Typical domains of applications include PV, metallurgy, LED manufacturing, corrosion studies, organic and micro-electronics, materials research & development, deposition processes optimisation, PVD, CVD, plasma coatings, automotive, Li batteries, etc
No UHV required.
Measurement of all elements of interest (including H, D, O, Li, Na, C, N etc) with patented High Dynamic Detectors.
Optional monochromator with Image mode and high Dynamic detection for full spectrum record and total flexibility.
Pulsed RF Source for operation in RF and pulsed RF modes with auto-matching
Differential double pumping of the source for patented SEM sample preparation
Plasma Cleaning function built in
Patented UFS for Ultra-Fast Sputtering of polymeric and organic materials
Patented DIP – built in interferometer for direct on line depth measurement
Various anode diameters and accessories for odd shape samples
Windows 10 software – Multiple copies provided for remote installations