Why HiPiMS?
Improved film density and adhesion
Better film uniformity
Increased control over film thickness and structure
Reduced substrate damage
Greater efficiency and cost-effectiveness
Lower environmental impact
General features:
Available either with integrated power supply or with customer DC power supply.
Adjustable peak voltage (≤1200 V) and peak power (≤10 kW)
Customizable pulse duration (5…100 µs)
Plug-and-play configuration
Arc control
Technical Specifications:
HipStar – S Slim:
Peak Voltage, [V]: < 900
Peak Current, [A]: < 60
Pulse Duration, [microseconds]: 5.. 150
Peak Power [kW]: < 5
Average Output Power [W]: < 100
Weight, [kg]: < 5
Mains [VAC/ A]: 230/ 0.5
Negative High Voltage Input Supply [V, DC], 600 W, external: < 900
HipStar – M Midsize:
Peak Voltage, [V]: < 1200
Peak Current, [A]: < 100
Pulse Duration, [microseconds]: 5.. 150
Peak Power [kW]: < 10
Average Output Power [W]: < 500
Weight, [kg]: < 9
Mains [VAC/ A]: 230/ 2
Negative High Voltage Input Supply [V, DC], 600 W, external: < 1200
Environmental Specifications:
M-1200/100
Operating temperature: +5°C to + 40°C
Storage temperature: -25°C to +55°C
Relative Humidity: max 85% non-condensing
Cooling: Air Cooling
Norms: CE Marked