AeroTrak+ 6000 Series Remote Particle Counters | TSI

The AeroTrak+ 6000 Series combines an optical particle counter, internal pump and local storage in a compact stainless-steel enclosure. It is designed for monitoring points without an external vacuum system or where installation flexibility matters.

Models 6201, 6301 and 6501 cover thresholds from 0.2 to 25 µm at the same 2.83 L/min flow. Ethernet, optional wireless connectivity and FMS integration support scalable networks for semiconductor, electronics and clean industrial manufacturing.

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Compact and relocatable

The integrated pump simplifies installation and allows relocation as production layouts change. Sampling-line length and geometry must still be controlled to limit particle losses.

Key benefits

Internal pump and 2.83 L/min flow without central vacuum.

Models from 0.2 µm for semiconductor to 25 µm channels for industrial production.

Second-by-second sampling for early visibility of adverse trends.

Local storage for 250,000 samples and one-second data buffering.

Ethernet, Modbus RTU, wireless option and 4–20 mA outputs.

PoE+ or 12–24 VDC power for flexible integration.

Predictive maintenance alerts and automatic pump stop when the inlet is blocked.

ISO 21501-4 and manufacturer-stated five-year laser warranty.

How it works

Select the model according to critical particle size and application range.

Install the sensor close to the risk point and connect power/network.

The internal pump draws the sample and continuously records configured channels.

Data and status are stored locally and transferred over Ethernet, wireless or FMS.

Limits and trends support alarms, investigations and process decisions.

Model selection and specifications

Model	Flow	Available channels	Applications
6201	2.83 L/min	0.2, 0.3, 0.5, 1.0 µm	Semiconductor and flat-panel displays
6301	2.83 L/min	0.3, 0.5, 5, 10 µm or 0.3, 0.5, 1, 5, 10, 25 µm	Electronics, semiconductor, automotive, optics, aerospace
6501	2.83 L/min	Configurations from 0.5 to 25 µm	Electronics and clean industrial manufacturing

Common specifications

Parameter	Value
Concentration limit	4,860,000 particles/ft³ at 10% coincidence loss
Zero count	<1 count per 5 minutes at 95% UCL
Communication	Ethernet TCP/IP, Modbus RTU; wireless option
Storage	250,000 samples; 15 minutes of one-second data
Standards	CE, JIS B9921, ISO 21501-4
Power	PoE+ IEEE 802.3at or 12–24 VDC, 30 W
Housing	Stainless steel; sealed inlet
Operating environment	10–40°C; 20–95% RH non-condensing

Applications

Continuous monitoring in semiconductor and electronics plants.

Mini-environments, process tools and transfer points.

Optics, automotive and aerospace component production.

Flexible lines where monitoring locations change with layout.

Early detection of trends before defects or scrap occur.

Integration of particle, environmental and process data in FMS/MES.

Configuration and support from APEL Laser

APEL Laser can support model selection, sampling-point and tubing design, network architecture, FMS/MES integration, installation and training. Alarm limits should be based on process risk and baseline data rather than generic limits alone.

Frequently asked questions

What is the difference between 6201, 6301 and 6501?

Minimum threshold and channel options: 6201 starts at 0.2 µm, 6301 at 0.3 µm and 6501 at 0.5 µm with options up to 25 µm.

Is a vacuum network required?

No. Each unit has an integrated pump.

Can it continue during a network outage?

Data are stored locally; exact buffering and recovery behaviour should be confirmed for the selected FMS configuration.

Can it be powered over Ethernet?

Yes. PoE+ or separate DC power is available.

Is it intended for aseptic pharmaceutical monitoring?

The series is primarily industrial and semiconductor focused. For GMP/VHP needs and 1 CFM flow, evaluate the 6310/6510 family or AeroTrak+ life-science portfolio.