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WS-1000 Wet Station for Spin Coaters | Laurell Technologies Corporation
The Laurell WS-1000 Series Spin-Process Stations allow a fully configured and tested module to be constructed and shipped complete — requiring only the minimum of installation time. Easy to load and operate — everything is in convenient reach to the operator.
Resources:
Description
Features & Benefits:
All-polypropylene construction (self-extinguishing available, see below*).
Accommodates the installation of any Laurell spin processor.
Perforated wet-deck (easily removable).
Wet plenum.
Exhaust Plenum with gauge.
Isolated component / drawer below for heaters, pumps, vessels…
Technical Specifications:
Dimensions: 48″” W x 43 3/8″” D x 74 1/4″” H (121.9cm W x 110.04cm D x 188.60cm H).
Options:
Touch Screen Control Interface.
Processor exhaust interlock (standard on EDC™ models).
Chemical Heating.
Through pressure vessel material stirring (magnetic).
Rinse to resistivity.
Drain diverter(s).
Vacuum loading wand.
Wafer cassette stand.
Leak detection.
Light towers.
Additional information
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