Features and Benefits:
Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
Quantitative surface metrology with nanometer-level precision provides superior gage capability.
High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas.
Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
Included Mx software provides comprehensive tools for surface data visualization, analysis and reporting.
Expand the measurement range of your investment with accessories that include objective turrets, manual and motorized sample stages, and optional software modules for film topography profiling and 2D analysis using Cognex VisionPro®.
Smart Setup technology reduces training time, and shortens part changeover by automating part finding, light setting, and scan configuration. Smart Setup usually results in a first data map within 1 minute of placing the sample under the objective.
Cost-effective price-to-performance ratio compares favorably to alternative systems, including mechanical contact stylus profilers.
Non-contact method means no consumable replacement costs to worry about.
Technical Specifications:
Dimensions (H × W × D): 156 x 127 x 76 cm (ZeGage PRO on workstation)
82 × 53 × 53 cm (ZeGage PRO)
74 × 127 x 76 cm (Workstation)
System Weight:
ZeGage PRO: 54 kg
Workstation: 37 kg
Utility Requirements:
100 to 240 VAC, 50/60 Hz
Illuminator: Integrated Long life white light LED with computer controlled light level
Scanner: Long range Z scan
Measurement Technique: Non-contact 3D Coherence Scanning Interferometry (CSI)
Stage Control: ZYGO Pendant
Safety: Integrated Emergency Motion Stop
Data Points: (max) >1.9 million
