High Power Pulsed Generators for Reliable Magnetron Sputtering

Why HiPiMS?

Improved film density and adhesion
Better film uniformity
Increased control over film thickness and structure
Reduced substrate damage
Greater efficiency and cost-effectiveness
Lower environmental impact

General features:

Available either with integrated power supply or with customer DC power supply.
Adjustable peak voltage (≤1200 V) and peak power (≤10 kW)
Customizable pulse duration (5…100 µs)
Plug-and-play configuration
Arc control

Technical Specifications:

HipStar – S Slim:

Peak Voltage, [V]: < 900
Peak Current, [A]: < 60
Pulse Duration, [microseconds]: 5.. 150
Peak Power [kW]: < 5
Average Output Power [W]: < 100
Weight, [kg]: < 5
Mains [VAC/ A]: 230/ 0.5
Negative High Voltage Input Supply [V, DC], 600 W, external: < 900

HipStar – M Midsize:

Peak Voltage, [V]: < 1200
Peak Current, [A]: < 100
Pulse Duration, [microseconds]: 5.. 150
Peak Power [kW]: < 10
Average Output Power [W]: < 500
Weight, [kg]: < 9
Mains [VAC/ A]: 230/ 2
Negative High Voltage Input Supply [V, DC], 600 W, external: < 1200

Environmental Specifications:
M-1200/100
Operating temperature: +5°C to + 40°C
Storage temperature: -25°C to +55°C
Relative Humidity: max 85% non-condensing
Cooling: Air Cooling
Norms: CE Marked