Features & Benefits:
Selection of 157 nm, 193 nm, 248 nm, 308 nm, and 351 nm wavelengths for full material flexibility.
Superior pulse energy of up to 750 mJ to enable effective ablation at large field size.
Unrivalled pulse stability of 0.75%, rms to ensure high fluence control.
Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films.
Compact, easy to integrate excimer laser with single phase supply. Choice of maximum repetition rates from 10 Hz to 100 Hz, with maximum pulse energies up to 750 mJ.