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H6-23 Spin Coater | Laurell Technologies Corporation
The Laurell H6-23 spin coater is compact, packed with advanced features, and designed to the be the easiest spin coater to install in your glove box. This 650-series HL coater system will accommodate up to ø150mm wafers and 5″ × 5″ (127mm × 127mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).
Resources:
Description
Features & Benefits:
Motors, electronics, & software designed and custom-built from the ground up to eliminate unpredictability.
Large bowl-shaped process chamber to reduce turbulence and eliminate splash back while spin coating.
A seamless copolymer housing and no exposed metal allows use of a wider range of chemistry and more flexible processing.
Transparent Halar® lids, solid construction, system interlocks, and independent testing ensure operator safety.
Everyday ergonomics means ease of access to the chuck and process chamber. No need to drop your substrate on to a chuck.
Field upgradeable spin coaters — add features as you need them.
Technical Specifications:
HL Series (HeadLess)
H6-23:
Controller: HL Series.
Max Substrate Size: ø150mm (5″ × 5″)
Max RPM: 12,000 rpm.
Mounting Options :Tabletop, On-Deck
Additional information
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