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Diffusion & LPCVD Furnaces | Thermco Systems
Product Series
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2000 Series (2400 / 2600 / 2800) – Ideal for R&D and pilot lines, with up to 4-level process chambers for substrates up to 150 mm
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5000 / 5200 Series (5100 & 5200) – Long flatzone process tubes for substrate sizes up to 150 mm
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8000 Series (8100 & 8200) – High-volume production tools for up to 200 mm wafers, with flatzones up to 1,200 mm
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X10, X60, X80 Mini-Furnaces – Compact R&D systems with 300 mm flatzone and ultra-clean wafer loading
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VTR6000EX / VTR7000EX – Vertical furnace retrofit solution with modern touchscreen interface and AI-based diagnostics
Description
Data Control with Reactive Intelligence
Thermco Systems is globally recognized as a leading supplier of horizontal diffusion and LPCVD furnaces. Built on a proven platform and equipped with a state-of-the-art intelligent control system, these solutions deliver outstanding process performance and improved productivity.
With over 50 years of experience, Thermco offers:
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The world’s largest installed base, with the lowest cost of ownership (CoO) and highest mean time between failures (MTBF)
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Continuous innovation, delivering next-generation solutions
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A comprehensive product range from R&D lab systems to high-volume production tools
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Compatibility with 50 mm to 300 mm substrates
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A global support network and long-term commitment to customers
Additional information
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