Features and Benefits:
Multiple data collection techniques provide maximum application fl exibility— for surface heights from angstroms to millimeters
SureScan™ technology enables precision metrology in vibration-prone environments
Smart PSI technology enables sub-Å surface metrology in seconds
Correlation to 2D and 3D standards with compliance to ISO 25178 topography results
Streamlined Mx™ software
Built in pass/fail, SPC, reporting, and run statistics
Built in pneumatic vibration isolation
Open structure provides clear part visibility and access
Built in 75 mm head riser accommodates taller samples
Optional thick fi lms analysis for transparent fi lms >400 nm thick
Optional advanced thin fi lms software for fi lms 50-1000 nm
Optional 2D analysis Vision Software Suite
Technical Specifications:
Surface Topography Repeatability: 0.06 nm for all magnifi cations
Repeatability of the RMS: 0.005 nm
Sample Stage: XY travel: 200 mm
Tilt: +/- 4°
Capacity: 20 lbs
System Options:
Encoded XYZ stages
200×325 mm long travel XY stage
Theta stage
Dimensions (H x W x D): 146 × 73 × 61 cm (57.48 × 28.74 × 24.02 in)
System Weight: 248 kg (547 lbs)
