Optical profiler – ZeGage™ | Zygo Corporation

The system uses coherence scanning interferometry to rapidly generate quantitative three-dimensional surface maps. Unlike a contact stylus profiler, optical measurement does not scratch or mechanically deform the sample, making it suitable for delicate, soft or finely structured surfaces.

ZeGage Pro can be installed in a metrology laboratory or close to the manufacturing process. ZYGO SureScan™ technology reduces the influence of environmental vibration, allowing high-precision measurement in many production environments without requiring a dedicated vibration-isolation table.

The system is available in two configurations:

• ZeGage Pro, providing vertical precision down to 3.5 nm;
• ZeGage Pro HR, providing vertical precision down to 0.15 nm for higher-precision surfaces and microstructures.

APEL Laser can help you select the model, objectives, sample positioning and software modules required for your application.

Request a quotation at: sales@apellaser.ro

Benefits of the ZYGO ZeGage Pro optical profiler

Non-contact 3D measurement

ZeGage Pro measures surfaces optically without touching the component. This eliminates the risk of scratching or mechanically deforming the surface and enables the characterisation of samples that may be difficult to inspect using a stylus instrument.

The system can be used to measure:

• 2D and 3D roughness;
• three-dimensional topography;
• step height;
• flatness and form;
• wear and volume;
• surface defects;
• textures and periodic structures;
• relative height between surface regions.

Fast full-area measurement

The optical profiler acquires a large number of measurement points simultaneously and generates a 3D representation of the complete field of view.

This provides substantially more information than a single stylus trace and makes it possible to identify local scratches, pores, defects and process variations.

Vibration-tolerant SureScan™ technology

ZYGO SureScan™ combines dedicated hardware and software algorithms to reduce the effect of environmental vibration during measurement.

The ZeGage Pro can therefore operate in many production environments without a separate vibration-isolation table. It can be positioned closer to the manufacturing process, reducing the time required to verify components.

Vertical precision independent of objective magnification

With ZYGO coherence scanning interferometry profilers, changing the objective primarily changes:

• field of view;
• lateral resolution;
• working distance;
• measurable surface slope.

Vertical precision is not determined by objective magnification. Users can therefore select the field of view required for the application without fundamentally sacrificing vertical measurement performance.

Interchangeable objectives

ZYGO offers a broad selection of interferometric objectives, with magnifications ranging from approximately 1× to 100×.

The appropriate objective can be selected for:

• measuring a large area in one acquisition;
• identifying small defects;
• inspecting microfabricated structures;
• measuring fine surface roughness;
• evaluating surfaces with relatively steep slopes.

The objectives are designed to provide long-term flexibility, allowing the system to be expanded as measurement requirements develop.

ZeGage Pro or ZeGage Pro HR?

ZeGage Pro

ZeGage Pro is the standard configuration for general quality control and surface characterisation.

It is suitable for:

• roughness and texture;
• step-height measurement;
• machined surfaces;
• precision mechanical components;
• wear measurement;
• manufacturing process control;
• routine production inspection.

The system provides specified vertical precision down to 3.5 nm.

ZeGage Pro HR

ZeGage Pro HR is the high-resolution configuration for applications requiring lower vertical measurement uncertainty.

It is recommended for:

• optical surfaces;
• ultra-precision components;
• micro- and nano-scale structures;
• low-roughness finishes;
• microelectronics and MEMS;
• advanced materials research.

The system provides specified vertical precision down to 0.15 nm.

Applications

Surface roughness measurement

ZeGage Pro can calculate line-based and areal roughness parameters, providing a more complete description of a surface than a single profile measurement.

It can be used to evaluate:

• milled surfaces;
• turned surfaces;
• lapped surfaces;
• ground components;
• polished surfaces;
• functional textures;
• treated or coated surfaces.

Step height and microstructures

The optical profiler can measure height differences between regions of a sample, including:

• etched steps;
• tracks and contact pads;
• microchannels;
• MEMS structures;
• microfluidic components;
• deposited layers;
• lithographically produced structures.

Optics and precision components

ZeGage Pro HR is suitable for measuring optical surfaces and components with very fine surface finishes.

Applications include:

• lenses and optical windows;
• mirrors;
• optical moulds;
• ultra-precision components;
• polished surfaces;
• scratch and defect evaluation;
• polishing-process control.

Automotive and mechanical engineering

The system can inspect functional surfaces on mechanical components, including:

• sealing surfaces;
• fuel-injection components;
• bearings;
• gears;
• engine components;
• honed surfaces;
• wear components;
• additively manufactured parts.

Microelectronics, MEMS and semiconductors

Non-contact measurement is well suited to sensitive structures and samples that must not be mechanically damaged.

Applications include:

• wafers;
• MEMS structures;
• microbumps;
• conductive tracks;
• substrates;
• etched microstructures;
• electronic packaging;
• post-process surface topography.

Coatings and surface treatments

ZeGage Pro can help evaluate the effects of:

• deposition;
• blasting;
• polishing;
• laser texturing;
• etching;
• coating;
• heat treatment;
• wear and friction.

Research and development

The system can support laboratories working in:

• materials science;
• tribology;
• micro- and nanofabrication;
• optics;
• mechanical engineering;
• energy research;
• medical devices;
• semiconductor research.

Main features

• non-contact three-dimensional surface measurement;
• characterisation of micro- and nano-scale features;
• coherence scanning interferometry;
• vibration-tolerant SureScan™ technology;
• SmartSetup for simplified measurement configuration;
• 1600 × 1200-pixel camera;
• approximately two million measurement points per acquisition;
• 100 mm motorised Z-axis travel;
• manual ±4° sample tilt;
• interchangeable interferometric objectives;
• optional manual or motorised multi-objective turret;
• ZYGO Mx™ acquisition and analysis software;
• compact format for laboratory and production use;
• rapid, repeatable measurement;
• ISO-compatible surface texture analysis.

Measurement technology

ZeGage Pro uses coherence scanning interferometry, also commonly described as CSI or white-light interferometry.

During measurement, an interferometric objective compares light reflected from the test surface with light reflected from an internal reference. The system scans vertically and analyses the interference signal at every camera pixel.

The result is a quantitative 3D surface map from which the software can calculate:

• height;
• roughness;
• flatness;
• volume;
• area;
• slope;
• waviness;
• surface texture parameters;
• defect dimensions.

ZYGO Mx™ software

Mx™ software controls the measurement, data processing and analysis workflow.

Available capabilities can include:

• 2D and 3D visualisation;
• roughness analysis;
• surface texture parameters;
• step-height measurement;
• wear and volume analysis;
• filtering and form removal;
• distance and angle measurement;
• defect identification;
• customised reporting;
• result export;
• repeatable measurement sequences;
• remote access and automated workflow integration, depending on configuration.

Mx™ can also be used to create standardised measurement procedures, reducing operator-dependent variation.

System configuration

Selecting the model

The choice between ZeGage Pro and ZeGage Pro HR depends on:

• expected surface roughness;
• feature height;
• required precision;
• process tolerances;
• surface type;
• installation environment;
• whether optical or ultra-precision surfaces must be measured.

Selecting an objective

The objective primarily determines:

• field of view;
• lateral resolution;
• accepted surface slope;
• working distance;
• minimum detectable defect size.

For a flexible configuration, the profiler can be fitted with a manual or motorised four-position objective turret.

Sample positioning

The standard configuration includes 100 mm of motorised Z travel and manual sample tilt adjustment.

Depending on the size and geometry of the component, the system may also require:

• XY stages;
• component fixtures;
• customised holders;
• sample adapters;
• a raised measurement head;
• calibration standards.

Software and automation

For repeated quality-control measurements, the system can be configured with:

• measurement recipes;
• pass/fail criteria;
• automated reports;
• data export;
• serial inspection workflows;
• integration into quality-control processes.

Why choose the ZYGO ZeGage Pro?

ZeGage Pro is suitable for organisations that require more surface information than a stylus profiler can provide, while retaining a compact and accessible instrument format.

Its principal benefits include:

• non-contact measurement;
• complete 3D surface maps;
• rapid acquisition;
• high vertical measurement performance;
• resistance to production-floor vibration;
• no vibration-isolation table in many applications;
• rapid changeover between applications;
• broad range of objectives;
• advanced analysis software;
• standardised inspection procedures;
• low operating costs without stylus consumables;
• suitability for research and production quality control.

Configuration and support from APEL Laser

APEL Laser can assist with the configuration of a ZeGage Pro system for your application.

Support can include:

• defining the measurement requirement;
• selecting the Pro or Pro HR model;
• selecting objectives;
• determining the required field of view;
• evaluating lateral resolution;
• selecting stages and sample fixtures;
• demonstrations and sample testing;
• installation;
• operator training;
• measurement-method development;
• technical support and service.

For an initial recommendation, provide:

• the material and surface type;
• sample dimensions;
• expected roughness;
• maximum feature height;
• minimum defect size;
• required field of view;
• tolerances to be verified;
• expected daily measurement volume.