{"id":27397,"date":"2025-07-15T11:33:23","date_gmt":"2025-07-15T08:33:23","guid":{"rendered":"https:\/\/apellaser.ro\/product\/electronic-materials-management-thermco-systems\/"},"modified":"2025-07-15T11:48:55","modified_gmt":"2025-07-15T08:48:55","slug":"electronic-materials-management-thermco-systems","status":"publish","type":"product","link":"https:\/\/apellaser.ro\/en\/product\/electronic-materials-management-thermco-systems\/","title":{"rendered":"ELECTRONIC MATERIALS MANAGEMENT | Thermco Systems"},"content":{"rendered":"
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Chemical Management and Distribution<\/a><\/h2>\n<\/div>\n<\/div>\n
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Wet chemical management starts with the chemical delivery of acids and solvents in bulk drums, these are typically in containers with volumes of 25 litres, 40 litres, and 200 litres. The chemical drums are contained within a\u00a0Chemical Distribution Unit (CDU)<\/a>\u00a0with chemicals supplied to the point of use by a pump or constant pressurised system.<\/p>\n

Larger chemical quantities can be supplied using Industrial Bulk Containers (IBC), which are stored externally to the CDU. CDUs typically have 2 drums to facilitate auto-changeover ensuring a seamless supply of chemicals regardless of size.<\/p>\n<\/div>\n

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Thermco\u2019s CDU<\/h2>\n<\/div>\n<\/div>\n
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Thermco\u2019s CDUs are intelligent units incorporating an HMI for setting parameters such as alarm levels and maintenance schedules and these can be interfaced directly to the fab host or to Thermco\u2019s central control system known as a \u2018Data Concentrator\u2019. Spent chemical recovery is achieved using a Waste Collection Unit (WCU) which is similar to a CDU, but works in reverse and is usually connected to a sump beneath a wet bench.<\/p>\n<\/div>\n

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Typical Chemicals<\/h2>\n<\/div>\n<\/div>\n
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Typical chemicals used in the Semiconductor industry comprise of aqueous solutions (acids and bases) and solvents, for example:<\/p>\n