{"id":27370,"date":"2025-07-15T10:54:11","date_gmt":"2025-07-15T07:54:11","guid":{"rendered":"https:\/\/apellaser.ro\/product\/epitaxial-reactor-systems-thermco-systems\/"},"modified":"2025-07-15T11:44:10","modified_gmt":"2025-07-15T08:44:10","slug":"epitaxial-reactor-systems-thermco-systems","status":"publish","type":"product","link":"https:\/\/apellaser.ro\/en\/product\/epitaxial-reactor-systems-thermco-systems\/","title":{"rendered":"Epitaxial Reactor Systems | Thermco Systems"},"content":{"rendered":"<p data-start=\"929\" data-end=\"1009\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">The <strong data-start=\"4\" data-end=\"14\">EpiPro<\/strong> family of systems addresses industry needs for high-throughput processing and low cost-of-ownership in silicon epitaxy. These dual-station batch solutions are designed for today&#8217;s production demands, offering both manual load\/unload and fully automated wafer handling.<\/span><\/p>\n<p data-start=\"1011\" data-end=\"1050\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Design highlights include:<\/span><\/p>\n<ul data-start=\"1051\" data-end=\"1440\">\n<li data-start=\"1051\" data-end=\"1094\">\n<p data-start=\"1053\" data-end=\"1094\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">High process flexibility; P and N doped materials<\/span><\/p>\n<\/li>\n<li data-start=\"1095\" data-end=\"1138\">\n<p data-start=\"1097\" data-end=\"1138\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Substrate sizes from 100\u2013200\u202fmm<\/span><\/p>\n<\/li>\n<li data-start=\"1139\" data-end=\"1182\">\n<p data-start=\"1141\" data-end=\"1182\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">EPI layer thickness from &lt;\u202f5\u202f\u00b5m to &gt;\u202f100\u202f\u00b5m<\/span><\/p>\n<\/li>\n<li data-start=\"1183\" data-end=\"1226\">\n<p data-start=\"1185\" data-end=\"1226\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Resistivity range from 0.02 \u03a9\u202fcm to 50 \u03a9\u202fcm<\/span><\/p>\n<\/li>\n<li data-start=\"1227\" data-end=\"1270\">\n<p data-start=\"1229\" data-end=\"1270\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Dual-process chamber systems<\/span><\/p>\n<\/li>\n<li data-start=\"1271\" data-end=\"1314\">\n<p data-start=\"1273\" data-end=\"1314\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">IG versions with dual RF supply for induction heaters<\/span><\/p>\n<\/li>\n<li data-start=\"1315\" data-end=\"1358\">\n<p data-start=\"1317\" data-end=\"1358\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Low cost-of-ownership and unique dopant injection system<\/span><\/p>\n<\/li>\n<li data-start=\"1359\" data-end=\"1440\">\n<p data-start=\"1361\" data-end=\"1440\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">Patented chamber features<\/span><\/p>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p data-start=\"1442\" data-end=\"1467\"><strong>Available configurations:<\/strong><\/p>\n<ul data-start=\"1468\" data-end=\"1641\">\n<li data-start=\"1468\" data-end=\"1511\">\n<p data-start=\"1470\" data-end=\"1511\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\"><strong>EpiPro 5000<\/strong>: manually loaded dual-reactor with induction coil heating and single-switching RF generator<\/span><\/p>\n<\/li>\n<li data-start=\"1512\" data-end=\"1555\">\n<p data-start=\"1514\" data-end=\"1555\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\"><strong>EpiPro 5000IG<\/strong>: manually loaded with dual-reactor and dedicated RF generator per reactor for higher throughput<\/span><\/p>\n<\/li>\n<li data-start=\"1556\" data-end=\"1599\">\n<p data-start=\"1558\" data-end=\"1599\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\"><strong>EpiPro 8000<\/strong>: automated dual-reactor with induction heating and single RF generator<\/span><\/p>\n<\/li>\n<li data-start=\"1600\" data-end=\"1641\">\n<p data-start=\"1602\" data-end=\"1641\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\"><strong>EpiPro 8000IG<\/strong>: automated dual-reactor with dedicated RF per reactor for maximum throughput<\/span><\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1643\" data-end=\"1723\"><span class=\"relative -mx-px my-[-0.2rem] rounded px-px py-[0.2rem] transition-colors duration-100 ease-in-out\">All models feature an upgraded PLC control system with a Windows-based touchscreen GUI and include a SECS\/GEM interface.<\/span><\/p>\n<p data-start=\"1643\" data-end=\"1723\"><strong>Resources:<\/strong><br \/>\n<a href=\"https:\/\/thermcosystems.com\/wp-content\/uploads\/2024\/07\/CSD-EPIPRO.pdf\"><button class=\"buton-resurse\">Brochure<\/button><\/a><a href=\"https:\/\/thermcosystems.com\/solutions\/epitaxial-reactors\/\" target=\"_blank\" rel=\"noopener\"><button class=\"buton-resurse\">Manufacturer<\/button><\/a><\/p>\n","protected":false},"featured_media":27363,"template":"","meta":[],"product_brand":[],"product_cat":[2200],"product_tag":[],"class_list":{"0":"post-27370","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-laboratory-equipment","7":"pa_producator-thermco-systems-en","9":"first","10":"instock","11":"shipping-taxable","12":"product-type-simple"},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Epitaxial Reactor Systems | Thermco Systems - APEL LASER<\/title>\n<meta name=\"description\" content=\"The EpiPro family of systems addresses industry needs for high-throughput processing and low cost-of-ownership in silicon epitaxy.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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