{"id":27366,"date":"2025-07-15T10:43:06","date_gmt":"2025-07-15T07:43:06","guid":{"rendered":"https:\/\/apellaser.ro\/product\/diffusion-lpcvd-furnaces-thermco-systems\/"},"modified":"2025-07-15T11:41:47","modified_gmt":"2025-07-15T08:41:47","slug":"diffusion-lpcvd-furnaces-thermco-systems","status":"publish","type":"product","link":"https:\/\/apellaser.ro\/en\/product\/diffusion-lpcvd-furnaces-thermco-systems\/","title":{"rendered":"Diffusion &#038; LPCVD Furnaces | Thermco Systems"},"content":{"rendered":"<p data-start=\"161\" data-end=\"204\"><strong data-start=\"161\" data-end=\"204\">Data Control with Reactive Intelligence<\/strong><\/p>\n<p data-start=\"206\" data-end=\"493\"><strong data-start=\"206\" data-end=\"225\">Thermco Systems<\/strong> is globally recognized as a leading supplier of <strong data-start=\"274\" data-end=\"317\">horizontal diffusion and LPCVD furnaces<\/strong>. Built on a proven platform and equipped with a state-of-the-art intelligent control system, these solutions deliver outstanding process performance and improved productivity.<\/p>\n<p data-start=\"495\" data-end=\"544\">With over 50 years of experience, Thermco offers:<\/p>\n<ul data-start=\"546\" data-end=\"979\">\n<li data-start=\"546\" data-end=\"683\">\n<p data-start=\"548\" data-end=\"683\"><strong data-start=\"548\" data-end=\"586\">The world\u2019s largest installed base<\/strong>, with the <strong data-start=\"597\" data-end=\"631\">lowest cost of ownership (CoO)<\/strong> and <strong data-start=\"636\" data-end=\"681\">highest mean time between failures (MTBF)<\/strong><\/p>\n<\/li>\n<li data-start=\"684\" data-end=\"755\">\n<p data-start=\"686\" data-end=\"755\"><strong data-start=\"686\" data-end=\"711\">Continuous innovation<\/strong>, delivering <strong data-start=\"724\" data-end=\"753\">next-generation solutions<\/strong><\/p>\n<\/li>\n<li data-start=\"756\" data-end=\"854\">\n<p data-start=\"758\" data-end=\"854\">A <strong data-start=\"760\" data-end=\"791\">comprehensive product range<\/strong> from <strong data-start=\"797\" data-end=\"816\">R&amp;D lab systems<\/strong> to <strong data-start=\"820\" data-end=\"852\">high-volume production tools<\/strong><\/p>\n<\/li>\n<li data-start=\"855\" data-end=\"908\">\n<p data-start=\"857\" data-end=\"908\">Compatibility with <strong data-start=\"876\" data-end=\"906\">50 mm to 300 mm substrates<\/strong><\/p>\n<\/li>\n<li data-start=\"909\" data-end=\"979\">\n<p data-start=\"911\" data-end=\"979\">A <strong data-start=\"913\" data-end=\"939\">global support network<\/strong> and long-term commitment to customers<\/p>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<h3 data-start=\"1431\" data-end=\"1461\">Product Series<\/h3>\n<ol data-start=\"1463\" data-end=\"2064\">\n<li data-start=\"1463\" data-end=\"1601\">\n<p data-start=\"1466\" data-end=\"1601\"><strong data-start=\"1466\" data-end=\"1502\">2000 Series (2400 \/ 2600 \/ 2800)<\/strong> \u2013 Ideal for R&amp;D and pilot lines, with up to 4-level process chambers for substrates up to 150 mm<\/p>\n<\/li>\n<li data-start=\"1602\" data-end=\"1706\">\n<p data-start=\"1605\" data-end=\"1706\"><strong data-start=\"1605\" data-end=\"1641\">5000 \/ 5200 Series (5100 &amp; 5200)<\/strong> \u2013 Long flatzone process tubes for substrate sizes up to 150 mm<\/p>\n<\/li>\n<li data-start=\"1707\" data-end=\"1827\">\n<p data-start=\"1710\" data-end=\"1827\"><strong data-start=\"1710\" data-end=\"1739\">8000 Series (8100 &amp; 8200)<\/strong> \u2013 High-volume production tools for up to 200 mm wafers, with flatzones up to 1,200 mm<\/p>\n<\/li>\n<li data-start=\"1828\" data-end=\"1937\">\n<p data-start=\"1831\" data-end=\"1937\"><strong data-start=\"1831\" data-end=\"1862\">X10, X60, X80 Mini-Furnaces<\/strong> \u2013 Compact R&amp;D systems with 300 mm flatzone and ultra-clean wafer loading<\/p>\n<\/li>\n<li data-start=\"1938\" data-end=\"2064\">\n<p data-start=\"1941\" data-end=\"2064\"><strong data-start=\"1941\" data-end=\"1966\">VTR6000EX \/ VTR7000EX<\/strong> \u2013 Vertical furnace retrofit solution with modern touchscreen interface and AI-based diagnostics<\/p>\n<\/li>\n<\/ol>\n<p><strong>Resources:<\/strong><br \/>\n<a href=\"https:\/\/thermcosystems.com\/wp-content\/uploads\/2022\/08\/8000series.pdf\"><button class=\"buton-resurse\">Brochure<\/button><\/a><a href=\"https:\/\/thermcosystems.com\/solutions\/diffusion-lpcvd-furnaces\/thermco-8000-series\/\" target=\"_blank\" rel=\"noopener\"><button class=\"buton-resurse\">Manufacturer<\/button><\/a><\/p>\n","protected":false},"featured_media":27365,"template":"","meta":[],"product_brand":[],"product_cat":[2200],"product_tag":[],"class_list":{"0":"post-27366","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-laboratory-equipment","7":"pa_producator-thermco-systems-en","9":"first","10":"instock","11":"shipping-taxable","12":"product-type-simple"},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Diffusion &amp; LPCVD Furnaces | Thermco Systems - APEL LASER<\/title>\n<meta name=\"description\" content=\"Thermco Systems is globally recognized as a leading supplier of horizontal diffusion and LPCVD furnaces. 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Built on a proven platform and equipped with a state-of-the-art intelligent control system, these solutions deliver outstanding process performance and improved productivity.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/apellaser.ro\/en\/product\/diffusion-lpcvd-furnaces-thermco-systems\/\" \/>\n<meta property=\"og:site_name\" content=\"APEL LASER\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/apellaser\" \/>\n<meta property=\"article:modified_time\" content=\"2025-07-15T08:41:47+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/apellaser.ro\/wp-content\/uploads\/2025\/07\/8000-series-hero-img.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1920\" \/>\n\t<meta property=\"og:image:height\" content=\"960\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/apellaser.ro\\\/en\\\/product\\\/diffusion-lpcvd-furnaces-thermco-systems\\\/\",\"url\":\"https:\\\/\\\/apellaser.ro\\\/en\\\/product\\\/diffusion-lpcvd-furnaces-thermco-systems\\\/\",\"name\":\"Diffusion & LPCVD Furnaces | Thermco Systems - APEL LASER\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/apellaser.ro\\\/en\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/apellaser.ro\\\/en\\\/product\\\/diffusion-lpcvd-furnaces-thermco-systems\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/apellaser.ro\\\/en\\\/product\\\/diffusion-lpcvd-furnaces-thermco-systems\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/apellaser.ro\\\/wp-content\\\/uploads\\\/2025\\\/07\\\/8000-series-hero-img.jpg\",\"datePublished\":\"2025-07-15T07:43:06+00:00\",\"dateModified\":\"2025-07-15T08:41:47+00:00\",\"description\":\"Thermco Systems is globally recognized as a leading supplier of horizontal diffusion and LPCVD furnaces. 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